The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Feb. 15, 2006
Ejaj Ahmed, Chicago, IL (US);
Charles N. Archie, Granite Springs, NY (US);
Stephen W. Goodrich, South Burlington, VT (US);
Eric P. Solecky, Hyde Park, NY (US);
Georgios A. Vakas, Poughkeepsie, NY (US);
Erwin E. Weissmann, Southbury, CT (US);
Lin Zhou, LaGrangeville, NY (US);
Ejaj Ahmed, Chicago, IL (US);
Charles N. Archie, Granite Springs, NY (US);
Stephen W. Goodrich, South Burlington, VT (US);
Eric P. Solecky, Hyde Park, NY (US);
Georgios A. Vakas, Poughkeepsie, NY (US);
Erwin E. Weissmann, Southbury, CT (US);
Lin Zhou, LaGrangeville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences therebetween, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.