The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Sep. 08, 2006
Kyeong-koo Chi, Seoul, KR;
Seung-pil Chung, Seoul, KR;
Chang-jin Kang, Seongnam-si, KR;
Jai-hyuk Song, Seoul, KR;
Kyeong-koo Chi, Seoul, KR;
Seung-pil Chung, Seoul, KR;
Chang-jin Kang, Seongnam-si, KR;
Jai-hyuk Song, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A method of fabricating a flash memory device using a process for forming a self-aligned floating gate is provided. The method comprises forming mask patterns on a substrate, etching the substrate using the mask patterns as an etch mask to form a plurality of trenches, and filling the trenches with a first insulating layer, wherein sidewalls of the mask patterns remain exposed after filling the trenches with the first insulating layer. The method further comprises forming spacers on the exposed sidewalls of the mask patterns, filling upper insulating spaces with a second insulating layer thereby defining isolation layers, and removing the mask patterns and the spacers.