The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2007
Filed:
Sep. 26, 2003
Hidong Kwak, San Jose, CA (US);
Gary Janik, Palo Alto, CA (US);
Mehrdad Nikoonahad, Menlo Park, CA (US);
Hidong Kwak, San Jose, CA (US);
Gary Janik, Palo Alto, CA (US);
Mehrdad Nikoonahad, Menlo Park, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
In one embodiment, a probe pulse is first stretched into a pulse of longer duration. The probe pulse comprises a plurality of wavelength components in a bandwidth, so that each temporal portion of the converted pulse corresponds to and comprises one of the wavelength components. This converted pulse is supplied to the sample at the time when it is affected by the disturbance of the sample caused by a pump pulse. Changes in characteristics of the sample at the wavelength components of the temporal portions of the converted pulse are then detected after the converted pulse has been modified by the sample. Such changes are then analyzed to derive characteristics of the sample. In another embodiment, a converter passes to a detector radiation from a probe beam that has been modified by the sample during a temporal sequence of time intervals, where the time intervals correspond to displacement in a spatial record. The radiation passed comprises radiation from the probe beam when it is affected by the disturbance in the sample caused by a pump pulse. The output of the detector is then analyzed to determine the characteristics of the sample.