The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2007
Filed:
May. 08, 2003
Boaz Brill, Rehovot, IL;
Moshe Finarov, Rehovot, IL;
David Scheiner, Yehuda, IL;
Nova Measuring Instruments Ltd., Rehovot, IL;
Abstract
An optical system for use in measurements in a sample comprising a light source () operable to produce an incident light beam propagating in a certain direction towards the sample (S) through an illumination channel (IC), a detector unit () for collecting light coming from the sample through a detection channel (DC), and generating data indicative of the collected light, a light directing assembly () operable to direct the incident beam onto a certain location on the sample's plane with a plurality of incident angles, and to direct light returned from the illuminated location to the detector unit (), the light directing assembly () comprising a plurality of beam deflector elements (A-D), at least one of the deflector elements being movable and position of said at least one movable deflector element defining one of the selected incident angles.