The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Aug. 29, 2005
Wei-sheng Chia, Hsinchu, TW;
Chih-jung Chen, Taipei, TW;
Chung-an Chen, Taichung, TW;
Chih-chung Huang, Hsinchu County, TW;
Wei-Sheng Chia, Hsinchu, TW;
Chih-Jung Chen, Taipei, TW;
Chung-An Chen, Taichung, TW;
Chih-Chung Huang, Hsinchu County, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A stacked alignment mark. The stacked alignment mark comprises a first alignment mark and a second alignment mark. The first alignment mark is located in a first film layer, wherein the first alignment mark is composed of a plurality of conductive wires. The second alignment mark is located in a second film layer under the first film layer. The first alignment mark is located in a first region corresponding to a second region in which the second alignment mark is located. Moreover, the second alignment mark at least contains a third region directly under a space between each two adjacent first conductive wires.