The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
May. 12, 2005
John P. Simons, Wappingers Falls, NY (US);
Kenneth J. Mccullough, Fishkill, NY (US);
Wayne M. Moreau, Wappingers Falls, NY (US);
John M. Cotte, New Fairfield, CT (US);
Keith R. Pope, Bedford, NH (US);
Charles J. Taft, Wappingers Falls, NY (US);
Dario Goldfarb, Mohegan Lake, NY (US);
John P. Simons, Wappingers Falls, NY (US);
Kenneth J. McCullough, Fishkill, NY (US);
Wayne M. Moreau, Wappingers Falls, NY (US);
John M. Cotte, New Fairfield, CT (US);
Keith R. Pope, Bedford, NH (US);
Charles J. Taft, Wappingers Falls, NY (US);
Dario Goldfarb, Mohegan Lake, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for cleaning a semiconductor structure including providing a chamber for holding the semiconductor structure and a dense phase fluid, providing a thermal transfer device having a thermal transfer surface, connecting the thermal transfer device to the chamber, placing the semiconductor structure in the chamber in contact with the thermal transfer surface and thermally cycling the thermal transfer surface.