The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Jun. 27, 2006
Wataru Machiyama, Kai, JP;
Shigeru Ishizawa, Nirasaki, JP;
Hiroshi Koizumi, Nirasaki, JP;
Tsutomu Hiroki, Nirasaki, JP;
Keisuke Kondoh, Nirasaki, JP;
Wataru Machiyama, Kai, JP;
Shigeru Ishizawa, Nirasaki, JP;
Hiroshi Koizumi, Nirasaki, JP;
Tsutomu Hiroki, Nirasaki, JP;
Keisuke Kondoh, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing system includes a transfer chamber, a plurality of chambers connected to the transfer chamber, a transfer apparatus disposed in the transfer chamber, and a control section configured to control the transfer apparatus. The transfer apparatus includes a base and transfer arm configured to perform a slide motion and a swing motion, respectively. The control section includes a storage portion and an operational controller. The storage portion stores pattern model data concerning a plurality of motion patterns each indicative of a composite motion of the slide motion and the swing motion, and track model data concerning time-based motion tracks respectively corresponding to the motion patterns. The operational controller is configured to retrieve necessary data from the pattern model data and the track model data and control the transfer apparatus in accordance therewith.