The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Jul. 29, 2003
Ulrich Wegmann, Koenigsbronn, DE;
Michael Hartl, Munich, DE;
Markus Mengel, Heidenheim, DE;
Manfred Dahl, Lauchheim, DE;
Helmut Haidner, Aalen, DE;
Martin Schriever, Aalen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Ulrich Wegmann, Koenigsbronn, DE;
Michael Hartl, Munich, DE;
Markus Mengel, Heidenheim, DE;
Manfred Dahl, Lauchheim, DE;
Helmut Haidner, Aalen, DE;
Martin Schriever, Aalen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of polarization is directed onto the optical system, the exit-side state of polarization is measured, and the influencing of the state of polarization is determined by the optical system with the aid of evaluation of the exit state of polarization with reference to the entrance state of polarization. An analyser arrangement which can be used for this purpose is also disclosed. The method and the apparatus are used, e.g., to determine the influencing of the state of polarization of optical radiation by an optical imaging system of prescribable aperture, the determination being performed in a pupil-resolved fashion.