The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Jan. 09, 2006
Heiner Jaksch, Heidenheim, DE;
Johannes Bihr, Aalen, DE;
Heiner Jaksch, Heidenheim, DE;
Johannes Bihr, Aalen, DE;
Carl Zeiss NTS GmbH, Oberkochen, DE;
Abstract
With a detector system for the specimen chamber of a scanning electron microscope, signals are simultaneously detected in transmission which signals correspond to a light field contrast and a dark field contrast. The detector system () includes four detectors (to) in a plane () between which an aperture () for free access of electrons is located. Behind the aperture (), a further detector () is arranged in a second plane (). The detectors are preferably diodes. The detectors () in the first plane (), which is closer to the specimen, serve to generate signals which correspond to a dark field contrast. The further detector (), more distant from the specimen, detects signals corresponding to a light field contrast. Large dead spaces, which are not sensitive to electrons, between the diodes and around the aperture (), can be avoided by the offset arrangement of four diodes () in the first plane ().