The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Dec. 02, 2004
Po-sung Kuo, Sinying, TW;
Yung-dar Chen, Baoshan Hsiang, TW;
Jheng-long Chou, Miao-Lee, TW;
Tung-li Wu, Shih-Chao Village, TW;
Ming-wen Huang, Hemei Town, TW;
Po-Sung Kuo, Sinying, TW;
Yung-Dar Chen, Baoshan Hsiang, TW;
Jheng-Long Chou, Miao-Lee, TW;
Tung-Li Wu, Shih-Chao Village, TW;
Ming-Wen Huang, Hemei Town, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.