Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method

Abstract

There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in staying in a prober until the inspection of all of the wafers is completed. Therefore, the time required to transfer the wafers of each lot to the subsequent step is delayed. As a result, it is difficult to shorten TAT (Turn-Around-Time), and it is difficult to flexibly operate the prober. A transfer system E according to the present invention includes: a host computer; a plurality of probersunder the control of the host computer; a plurality of RGVsfor delivering a wafer W to each of the probers, one by one, at its request; and a transfer operating unit, associated with the host computer, for operating the RGVs. The transfer operating unithas a schedulerA and a dispatcherB, for preparing an operating schedule for each of the RGVson the basis of the relationship in position between each of the probersand each of the RGVs, and for determining optimum transfer paths for the RGVs, to assign a corresponding one of the RGVsto a corresponding one of the optimum transfer paths.