The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Jun. 24, 2005
Sukesh Sandhu, Boise, ID (US);
Kelly T. Hurley, Boise, ID (US);
Sukesh Sandhu, Boise, ID (US);
Kelly T. Hurley, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
The invention includes methods in which common processing steps are utilized during fabrication of components of a memory array region of a semiconductor substrate and components of a peripheral region proximate the memory array region, and yet the components of the peripheral region are built for different performance characteristics than the components of the memory array region. The methods can include laterally recessing nitride-containing masking structures associated with the peripheral region to a greater extent than nitride-containing masking structures associated with the memory array region, followed by thermal oxidation of the substrate to form dielectric material adjacent the masking structures.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile