The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Jul. 23, 2004
Ian M. Mcmackin, Austin, TX (US);
Nicholas A. Stacey, Austin, TX (US);
Daniel A. Babbs, Austin, TX (US);
Duane J. Voth, Austin, TX (US);
Mathew P. C. Watts, Austin, TX (US);
Van N. Truskett, Austin, TX (US);
Frank Y. Xu, Austin, TX (US);
Ronald D. Voisin, Austin, TX (US);
Pankaj B. Lad, Austin, TX (US);
Ian M. McMackin, Austin, TX (US);
Nicholas A. Stacey, Austin, TX (US);
Daniel A. Babbs, Austin, TX (US);
Duane J. Voth, Austin, TX (US);
Mathew P. C. Watts, Austin, TX (US);
Van N. Truskett, Austin, TX (US);
Frank Y. Xu, Austin, TX (US);
Ronald D. Voisin, Austin, TX (US);
Pankaj B. Lad, Austin, TX (US);
University of Texas System, Board of Regents, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Abstract
The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.