The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Jun. 10, 2004
Paulus Antonius Andreas Teunissen, Eindhoven, NL;
Rene Marinus Gerardus Johan Queens, Eindhoven, NL;
Petra Albertina Margaretha Dekkers-rog, Eindhoven, NL;
Alexander Charles Franciscus Anna Van Well, Best, NL;
Paulus Antonius Andreas Teunissen, Eindhoven, NL;
Rene Marinus Gerardus Johan Queens, Eindhoven, NL;
Petra Albertina Margaretha Dekkers-Rog, Eindhoven, NL;
Alexander Charles Franciscus Anna Van Well, Best, NL;
ASML Netherlands B.V., , NL;
Abstract
A level sensor for a lithographic projection apparatus includes a light source configured to direct light onto a substrate to be measured, a detector configured to detect light reflected from the substrate, and a processor configured to calculate a difference between measurements made with the filter in the first configuration and in the second configuration. The sensor is adjustable between a first configuration, in which the light is given a first property, and a second configuration, in which the light is given a second property. The sensor may include a polarizing filter, such that the first and second properties are different polarization states.