The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Nov. 21, 2002
Hengpeng Wu, Hillsborough, NJ (US);
Shuji Ding-lee, Branchburg, NJ (US);
Zhong Xiang, Somerset, NJ (US);
Joseph E. Oberlander, Phillipsburg, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Eleazar Gonzalez, Bloomfield, NJ (US);
Jainhui Shan, Pennington, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Shuji Ding-Lee, Branchburg, NJ (US);
Zhong Xiang, Somerset, NJ (US);
Joseph E. Oberlander, Phillipsburg, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Eleazar Gonzalez, Bloomfield, NJ (US);
Jainhui Shan, Pennington, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The present invention relates to a novel antireflective coating composition comprising a polymer, a crosslinking agent and an acid generator. The present invention further relates to a process for using the novel composition, particularly at 193 nm. The polymer of the present invention contains at least one unit selected from structures 1, 2 and 3, where, Y is a hydrocarbyl linking group of 1 to about 10 carbon atoms, R, R, R' and R″ are independently hydrogen, hydrocarbyl group of 1 to about 10 carbon atoms, halogen, —O(CO)Z, —C(CF)Z, —C(CF)(CO)OZ, —SOCF, —(CO)OZ, —SOZ, —COZ, —OZ, —NZ, —SZ, —SOZ, —NHCOZ, —NZCOZ or —SONZ, where Z is H or a hydrocarbyl group of 1 to about 10 carbon atoms, n=1–4, X is O, CO, S, COO, CHO, CHCOO, SO, NH, NL, OWO, OW, W, and where L and W are independently hydrocarbyl groups of 1 to about 10 carbon atoms, and m=0–3.