The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2007

Filed:

Jul. 08, 2003
Applicants:

Ryosuke Yonekura, Kanagawa-ken, JP;

Yukiko Nishioka, Kanagawa-ken, JP;

Mitsuo Miyashita, Gunma-ken, JP;

Yoshikazu Ariga, Kanagawa-ken, JP;

Inventors:

Ryosuke Yonekura, Kanagawa-ken, JP;

Yukiko Nishioka, Kanagawa-ken, JP;

Mitsuo Miyashita, Gunma-ken, JP;

Yoshikazu Ariga, Kanagawa-ken, JP;

Assignee:

Ebara Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A cleaning apparatus and a cleaning method wherein cleaning and drying can be carried out in the same cleaning apparatus without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.


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