The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Apr. 29, 2004
Chien-hao Chen, Jhuangwei Township, Ylian County, TW;
Chia-lin Chen, Hsin-Chu, TW;
Tze Liang Lee, Hsin-Chu, TW;
Shih-chang Chen, Taoyuang, TW;
Ju-wang Hsu, Taipei, TW;
Chien-Hao Chen, Jhuangwei Township, Ylian County, TW;
Chia-Lin Chen, Hsin-Chu, TW;
Tze Liang Lee, Hsin-Chu, TW;
Shih-Chang Chen, Taoyuang, TW;
Ju-Wang Hsu, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A semiconductor device comprises a substrate, a gate disposed on the substrate, and a source and drain formed in the substrate on both sides of the gate. The device further comprises a thin spacer having a first layer and a second layer formed on the sidewalls of the gate, wherein the first and second layers have comparable wet etch rates of at least 10 Å per minute using the same etchant.