The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
May. 25, 2005
Daniel G. Berger, New Paltz, NY (US);
Raschid J. Bezama, Mahopac, NY (US);
Lester W. Herron, New Paltz, NY (US);
Bruno Michel, Adliswil, CH;
Govindarajan Natarajan, Poughkeepsie, NY (US);
Daniel G. Berger, New Paltz, NY (US);
Raschid J. Bezama, Mahopac, NY (US);
Lester W. Herron, New Paltz, NY (US);
Bruno Michel, Adliswil, CH;
Govindarajan Natarajan, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A manifold apparatus, system and method for thermally controlling a substrate whereby a manifold body having a microjet array and a drain array traversing there-through in a direction orthogonal to a substrate surface and parallel to each other is attached to the substrate surface for heating or cooling thereof. A cavity of the manifold body resides over the substrate surface such that liquid is emitted from the liquid microjets into the cavity for contact with the substrate surface, while the drains orthogonally remove spent liquid from the cavity. The manifold body is designed and configured into a plurality of cooling cells, whereby each cooling cell has a liquid microjet surrounded by at least three drains for preventing interactions between adjacent liquid microjets within adjacent cooling cells. Gas microjets may also traverse through the manifold body to form an atomized liquid spray for contact with the substrate surface.