The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Jun. 24, 2004
Erik Leonardus Ham, Rotterdam, NL;
Robert Gabriël Maria Lansbergen, Schiedam, NL;
Ellart Alexander Meijer, Haarlem, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Hans Meiling, Waalre, NL;
Bastiaan Matthias Mertens, The Hague, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Gert-jan Heerens, Schoonhoven, NL;
Erik Leonardus Ham, Rotterdam, NL;
Robert Gabriël Maria Lansbergen, Schiedam, NL;
Ellart Alexander Meijer, Haarlem, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Hans Meiling, Waalre, NL;
Bastiaan Matthias Mertens, The Hague, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Gert-Jan Heerens, Schoonhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.