The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Jul. 01, 2004
Gerard Van Schothorst, Hedel, NL;
Jan Van Eijk, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Robert-han Munnig Schmidt, Hapert, NL;
Felix Godfried Peter Peeters, Lieshout, NL;
Gerard Van Schothorst, Hedel, NL;
Jan Van Eijk, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Robert-Han Munnig Schmidt, Hapert, NL;
Felix Godfried Peter Peeters, Lieshout, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is presented in which vibrations induced by reaction forces exerted on a base frame BF by accelerations within the apparatus are eliminated without the need for complex positioning systems and several balance masses. This is achieved by using feed-forward control to apply a compensating force using actuators to the base frame, based on knowledge of the movements and accelerations of the substrate table and other parts within the apparatus.