The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Dec. 23, 2003
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A contamination barrier that passes through radiation from a radiation source and captures debris coming from the radiation source is disclosed. The contamination barrier includes an inner ring, an outer ring, and a plurality of lamellas. The lamellas extend in a radial direction from a main axis, and each of the lamellas is positioned in a respective plane that include the main axis. At least one outer end of each of the lamellas is slidably connected to at least one of the inner and outer ring.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile