The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Oct. 12, 2004
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Wil{acute Over (H)}elmus Petrus DE Boeij, Veldhoven, NL;
Carsten Andreas Kohler, Veldhoven, NL;
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Wil{acute over (h)}elmus Petrus De Boeij, Veldhoven, NL;
Carsten Andreas Kohler, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
To compensate for birefringence of a mask in a lithographic projection apparatus, the birefringence of a mask is measured and stored as birefringence data in a data storage device. A birefringent compensation element is disposed in the optical path of the lithographic projection apparatus. Appropriate adjustments of the compensation element are determined as those optimally reducing impact of the mask birefringence on the state of polarization at substrate level.