The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Apr. 29, 2004
Applicants:
Patricia Vreugdewater, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Inventors:
Patricia Vreugdewater, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic projection apparatus includes a conduit shuttle used to at least partly support conduits which provide utilities to moveable objects. The conduit shuttle has an actuator which is positionable with six degrees of freedom. The actuator comprises a 2-phase or 3-phase motor with one degree of freedom and a Lorentz actuator with five degrees of freedom.