The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Dec. 13, 2002
Applicant:
Tsutomu Higashiura, Nirasaki, JP;
Inventor:
Tsutomu Higashiura, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/30 (2006.01); C23C 8/00 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A frequency control circuit () controls an oscillation frequency of a second high frequency power sourcebased on a phase difference between a voltage component and a current component measured by a phase difference sensor () and an input impedance to an impedance matching device () measured by an impedance sensor (). An amplitude control circuit () controls a level of a high frequency electricity output by the second high frequency power source () based on an electricity (effective electricity) which is measured by a power sensor () and is to be supplied to the impedance matching device ().