The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Jun. 16, 2003
Sundar Ramamurthy, Fremont, CA (US);
Vedapuram Achutharaman, San Jose, CA (US);
Ho T. Fang, San Jose, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Vedapuram Achutharaman, San Jose, CA (US);
Ho T. Fang, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The cylinder includes a core and a coating covering most of the core. The core is made from a heat-resistant or insulating material. The core has inner and outer side walls and opposing first and second ends. The outer side wall is further away from a central longitudinal axis of the cylinder than the inner wall. The first end is configured to contact an edge ring that supports a semiconductor substrate. The coating is substantially opaque to infrared radiation, and covers all external surfaces of the core except for the first end. The core is preferably made from quartz or ceramics, while the coating is preferably made from a polysilicon.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile