The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Dec. 10, 2004
Hisatomo Ohno, Tokyo, JP;
Toshihiro Izumi, Tokyo, JP;
Mitsuru Saito, Tokyo, JP;
Takuya Nagamine, Tokyo, JP;
Claughton Miller, Hayward, CA (US);
Ichiro Kodaka, Hayward, CA (US);
Hisatomo Ohno, Tokyo, JP;
Toshihiro Izumi, Tokyo, JP;
Mitsuru Saito, Tokyo, JP;
Takuya Nagamine, Tokyo, JP;
Claughton Miller, Hayward, CA (US);
Ichiro Kodaka, Hayward, CA (US);
NIHON Microcoating Co., Ltd., Tokyo, JP;
Abstract
A transparent pad having a polishing surface with an average surface roughness of 5 μm or less is used as a polishing pad. An indentation is formed on the back surface of the transparent pad such that its rate of light transmission is locally changed. The transparent pad has a rate of light transmission equal to or greater than 10% or preferably 30% for light of at least one wavelength in the range of 350 nm–900 nm.