The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2007
Filed:
Apr. 14, 2005
Applicants:
Klaus Edinger, Heppenheim, DE;
Josef Sellmair, Reinheim, DE;
Thorsten Hofmann, Rodgau, DE;
Inventors:
Assignee:
NaWoTec GmbH, Rossdorf, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam () of charged particles, a shielding element () having an opening () for the beam of charged particles to pass through, wherein the opening () is sufficiently small and the shielding element () sufficiently closely positioned to the surface () of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.