The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Jun. 09, 2003
Daniel Murdoch Cotton, Mountain View, CA (US);
Nader Pakdaman, Los Gatos, CA (US);
James Squire Vickers, Jamaica Plain, MA (US);
Thomas Wong, Menlo Park, CA (US);
Daniel Murdoch Cotton, Mountain View, CA (US);
Nader Pakdaman, Los Gatos, CA (US);
James Squire Vickers, Jamaica Plain, MA (US);
Thomas Wong, Menlo Park, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).