The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Jul. 20, 2005
Shigekazu Komatsu, Nirasaki, JP;
Takanori Hyakudomi, Nirasaki, JP;
Hiromi Chaya, Kyoto, JP;
Takahisa Hayashi, Kyoto, JP;
Yukihide Shigeno, Kyoto, JP;
Shigekazu Komatsu, Nirasaki, JP;
Takanori Hyakudomi, Nirasaki, JP;
Hiromi Chaya, Kyoto, JP;
Takahisa Hayashi, Kyoto, JP;
Yukihide Shigeno, Kyoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.