The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Jun. 16, 2005
Nobutaka Kunimi, Tsukuba, JP;
Jun Kawahara, Tokyo, JP;
Akinori Nakano, Tama, JP;
Keizo Kinoshita, Tokyo, JP;
Nobutaka Kunimi, Tsukuba, JP;
Jun Kawahara, Tokyo, JP;
Akinori Nakano, Tama, JP;
Keizo Kinoshita, Tokyo, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
NEC Corporation, Tokyo, JP;
ASM Japan K.K., Tokyo, JP;
Abstract
A polymer film having a low dielectric constant is produced polymerizing a raw material gas containing a compound of the formula (1): wherein PCA represents a polycycloaliphatic hydrocarbon group, ALK represents a divalent aliphatic hydrocarbon group, m is 1 or 2, n is 0 or 1, and R1 and R2 represent independently each other an alkyl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryl group or an aryloxy group by a plasma polymerization method.