The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2007
Filed:
Mar. 30, 2005
Masahumi Mori, Ehime, JP;
Masahumi Mori, Ehime, JP;
Sumitomo Eaton Nova Corporation, Tokyo, JP;
Abstract
The wafer scanning device causes a wafer to scan in a vacuum area and includes a holderto hold a wafer, a ball screwto move the holderto scan, a motorto drive the ball screwand an integrally formed support frame. While the holderand the ball screware installed in the vacuum area, a transmission mechanism offset from the line of travel of the ball screwand the motorare installed in the atmosphere. Thus the wafer scanning device improves responsiveness with respect to the scanning speed control, enhances the uniformity of the scanning speed, has the motor or the like arranged properly and achieves the tilt of a wafer in a most preferable manner.