The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Dec. 22, 2003
Koji Mishima, Fujisawa, JP;
Junji Kunisawa, Yamato, JP;
Natsuki Makino, Fujisawa, JP;
Norio Kimura, Fujisawa, JP;
Hiroaki Inoue, Machida, JP;
Kenji Nakamura, Fujisawa, JP;
Moriji Matsumoto, Fujisawa, JP;
Takahiro Nanjo, Yokohama, JP;
Mitsuko Odagaki, Yokohama, JP;
Koji Mishima, Fujisawa, JP;
Junji Kunisawa, Yamato, JP;
Natsuki Makino, Fujisawa, JP;
Norio Kimura, Fujisawa, JP;
Hiroaki Inoue, Machida, JP;
Kenji Nakamura, Fujisawa, JP;
Moriji Matsumoto, Fujisawa, JP;
Takahiro Nanjo, Yokohama, JP;
Mitsuko Odagaki, Yokohama, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate processing apparatus fills a metal such as copper or the like in fine interconnection patterns or trenches defined in a semiconductor substrate. The substrate processing apparatus has a loading/unloading unit for placing a substrate cassette to allow a substrate to be loaded and unloaded, a substrate treating unit for treating a substrate, and a transfer robot for transferring a substrate between the loading/unloading unit and the substrate treating unit. The loading/unloading unit, the substrate treating unit, and the transfer robot are installed in a single facility. The loading/unloading unit has a rotary table which is horizontally rotatable for positioning the substrate cassette in a position to detect the substrate cassette placed in the loading/unloading unit and to remove the substrate from the substrate cassette with the transfer robot.