The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Dec. 19, 2005
Hiroaki Mito, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kazuo Kato, Naka, JP;
Tomohiro Kudo, Hitachinaka, JP;
Tomonori Saeki, Yokosuka, JP;
Yasuo Yahagi, Tokyo, JP;
Masayuki Kobayashi, Fujisawa, JP;
Hiroaki Mito, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kazuo Kato, Naka, JP;
Tomohiro Kudo, Hitachinaka, JP;
Tomonori Saeki, Yokosuka, JP;
Yasuo Yahagi, Tokyo, JP;
Masayuki Kobayashi, Fujisawa, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.