The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2007
Filed:
Apr. 08, 2004
Applicants:
Ko-pin Chang, Tainan, TW;
Jui-an Shih, Kaohsiung, TW;
Hui-tang Liu, Yongkang, TW;
Simon Chang, Pingzhen, TW;
Nain-sung Lee, Shin Chu, TW;
Yung-chang Peng, Jhubei, TW;
Inventors:
Ko-Pin Chang, Tainan, TW;
Jui-An Shih, Kaohsiung, TW;
Hui-Tang Liu, Yongkang, TW;
Simon Chang, Pingzhen, TW;
Nain-Sung Lee, Shin Chu, TW;
Yung-Chang Peng, Jhubei, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.