The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2007
Filed:
Aug. 09, 2002
Holger Jurgensen, Aachen, DE;
Johannes Kappeler, Wurselen, DE;
Gerd Strauch, Aachen, DE;
Dietmar Schmitz, Aachen, DE;
Holger Jurgensen, Aachen, DE;
Johannes Kappeler, Wurselen, DE;
Gerd Strauch, Aachen, DE;
Dietmar Schmitz, Aachen, DE;
Aixtron AG, , DE;
Abstract
A method for the production of coated substrates, such as OLEDs is disclosed, whereby at least one layer is deposited on the at least one substrate, by means of a condensation method and a solid and/or fluid precursor and, in particular, at least one sublimate source is used for at least one part of the reaction gases. The invention is characterized in that, by means of a temperature control of the reaction gases between precursor source(s) and substrate, a condensation of the reaction gases before the substrate(s) is avoided.