The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2007

Filed:

Dec. 22, 2003
Applicants:

Philip J. Ireland, Nampa, ID (US);

Werner Juengling, Boise, ID (US);

Stephen M. Krazit, Irving, TX (US);

Inventors:

Philip J. Ireland, Nampa, ID (US);

Werner Juengling, Boise, ID (US);

Stephen M. Krazit, Irving, TX (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of forming a semiconducting wafer is provided that utilizes fewer processing operations, reduces process variation, and lowers cost as well as production time. The method provided further improves via reliability by permitting vias to be formed with consistent aspect ratios. Devices and method are provided that substantially eliminate four way intersections on semiconductor wafers between conducting elements and supplemental elements. The devices and methods provide a more uniform deposition rate of a subsequent dielectric layer. Four way intersections are removed from both conductive element regions as well as supplemental element regions.


Find Patent Forward Citations

Ireland, Philip. (2007). Method and apparatus for a deposited fill layer (U.S. Patent No. 7196394). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7196394

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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