The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Aug. 27, 2003
Applicants:
Joeri Lof, Eindhoven, NL;
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Cheng-qun Gui, Best, NL;
Inventors:
Joeri Lof, Eindhoven, NL;
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Cheng-Qun Gui, Best, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An optical element is placed in the alignment beam during alignment. The optical element serves to focus the alignment beam onto the substrate alignment mark when it is at a different focal length from the front surface of the substrate.