The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Mar. 10, 2005
Jianou Shi, Milpitas, CA (US);
Jeffrey Rzepiela, Sunnyvale, CA (US);
Shiyou Pei, Saratoga, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
John Alexander, Gilbert, AZ (US);
Jianou Shi, Milpitas, CA (US);
Jeffrey Rzepiela, Sunnyvale, CA (US);
Shiyou Pei, Saratoga, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
John Alexander, Gilbert, AZ (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with different wavelengths of light substantially simultaneously. The different wavelengths of light are modulated at substantially the same frequency. The system is also configured to perform at least two measurements on the specimen. A minority carrier diffusion length of the specimen may be determined from the measurements and absorption coefficients of the specimen at the different wavelengths. Another system for detecting defects on a specimen is configured to deposit a charge at multiple locations on an upper surface of the specimen. This system is also configured to measure a vibration of a probe at the multiple locations. Defects may be detected on the specimen using a two-dimensional map of the specimen generated from the measured surface voltages.