The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Jun. 25, 2003
Applicants:
Norihiro Ito, Tosu, JP;
Hiroaki Kawaguchi, Tosu, JP;
Yasuhiro Chouno, Tosu, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo-to, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F22B 1/28 (2006.01); H01L 21/303 (2006.01);
U.S. Cl.
CPC ...
Abstract
A steam generator' provided in a substrate processing apparatus includes a tankhaving a hollow cylindrical memberformed of a composite of PTFE and PFA and a pair of side wall platesconnected to the opposite ends of the cylindrical memberThe tankis surrounded by a shellof an aluminum alloy to prevent deformation of the tank due to internal pressure of the tank. A heateris attached to the outer surfaces of the plate membersof the shellThe shellrestrains the tankand compresses elastic sealing membersto sealingly engage the cylindrical memberand the side wall platewith each other.