The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Nov. 30, 2004
Kenji Watanabe, Kanagawa-ken, JP;
Tohru Satake, Kanagawa-ken, JP;
Mamoru Nakasuji, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Tsutomu Karimata, Kanagawa-ken, JP;
Nobuharu Noji, Kanagawa-ken, JP;
Keiichi Tohyama, Kanagawa-ken, JP;
Masahiro Hatakeyama, Kanagawa-ken, JP;
Kenji Watanabe, Kanagawa-ken, JP;
Tohru Satake, Kanagawa-ken, JP;
Mamoru Nakasuji, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Tsutomu Karimata, Kanagawa-ken, JP;
Nobuharu Noji, Kanagawa-ken, JP;
Keiichi Tohyama, Kanagawa-ken, JP;
Masahiro Hatakeyama, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An electron beam apparatus is provided for evaluating a sample at a high throughput and a high S/N ratio. As an electron beam emitted from an electron gun is irradiated to a sample placed on an X-Y-θ stage through an electrostatic lens, an objective lens and the like, secondary electrons or reflected electrons are emitted from the sample. The primary electron beam is incident at an incident angle set at approximately 35° or more by controlling a deflector. Electrons emitted from the sample is guided in the vertical direction, and focused on a detector. The detector is made up of an MCP, a fluorescent plate, a relay lens, and a TDI (or CCD). An electric signal from the TDI is supplied to a personal computer for image processing to generate a two-dimensional image of the sample.