The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Aug. 27, 2002
Tatsuhisa Fujii, Hiroshima, JP;
Kazuhiro Monden, Hiroshima, JP;
Mikiya Kasai, Hiroshima, JP;
Shogo Ishioka, Hiroshima, JP;
Shuji Yamaoka, Hiroshima, JP;
Tatsuhisa Fujii, Hiroshima, JP;
Kazuhiro Monden, Hiroshima, JP;
Mikiya Kasai, Hiroshima, JP;
Shogo Ishioka, Hiroshima, JP;
Shuji Yamaoka, Hiroshima, JP;
OHT Inc., Hiroshima, JP;
Abstract
Disclosed is an inspection sensor and inspection apparatus capable of accurately inspecting the shape of a conductive pattern. A sensor elementincludes an MOSFET, and an aluminum electrode (AL) serving as a passive element. The passive element or aluminum electrodeis connected to the gate of a MOSFETand the source of a MOSFET. A voltage VDD is supplied from a power supply circuitto the drain of the MOSFET, and the source of the MOSFETis connected to the drain of a MOSFET. A reset signal is entered from a vertical selection sectioninto the gate of the MOSFET, and the voltage VDD is supplied from the power supply circuitto the drain of the MOSFET. A selection signal is entered from the vertical selection sectioninto the gate of the MOSFET, and an output from the source of the MOSFETis entered into a lateral selection section