The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Dec. 13, 2004
Hans Butler, Best, NL;
Frank Auer, Valkenswaard, NL;
Martinus Van Duijnhoven, Deurne, NL;
Pieter Johannes Gertrudis Meijers, Horst, NL;
Jan-gerard Cornelis Van Der Toorn, Eindhoven, NL;
Joost DE Pee, Veldhoven, NL;
Hans Butler, Best, NL;
Frank Auer, Valkenswaard, NL;
Martinus Van Duijnhoven, Deurne, NL;
Pieter Johannes Gertrudis Meijers, Horst, NL;
Jan-Gerard Cornelis Van Der Toorn, Eindhoven, NL;
Joost De Pee, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.