The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Sep. 01, 2005
Sanjeev Kaushal, Austin, TX (US);
Pradeep Pandey, San Jose, CA (US);
Kenji Sugishima, Tokyo, JP;
Anthony Dip, Cedar Creek, TX (US);
David Smith, Cedar Creek, TX (US);
Raymond Joe, Austin, TX (US);
Sundar Gandhi, Austin, TX (US);
Sanjeev Kaushal, Austin, TX (US);
Pradeep Pandey, San Jose, CA (US);
Kenji Sugishima, Tokyo, JP;
Anthony Dip, Cedar Creek, TX (US);
David Smith, Cedar Creek, TX (US);
Raymond Joe, Austin, TX (US);
Sundar Gandhi, Austin, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of monitoring a thermal processing system in real-time using a built-in self test (BIST) table that includes positioning a plurality of wafers in a processing chamber in the thermal processing system; executing a real-time dynamic model to generate a predicted dynamic process response for the processing chamber during the processing time; creating a first measured dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the measured dynamic process response; and comparing the dynamic estimation error to operational thresholds established by one or more rules in the BIST table.