The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Apr. 05, 2006
Bogdan Swedek, Cupertino, CA (US);
David J. Lischka, San Jose, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Bogdan Swedek, Cupertino, CA (US);
David J. Lischka, San Jose, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing pad, polishing system, method of making a polishing pad and method of using a polishing pad. The polishing pad includes a polishing layer having a polishing surface, a backing layer with an aperture and a first portion that is permeable to liquid, and a sealant that penetrates a second portion of the backing layer adjacent to and surrounding the aperture such that the second portion is substantially impermeable to liquid. The aperture is positioned below a substantially fluid-impermeable element.