The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Mar. 01, 2006
Vamsi Velidandla, San Jose, CA (US);
Anoop Somanchi, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Steven W. Meeks, Fremont, CA (US);
Vamsi Velidandla, San Jose, CA (US);
Anoop Somanchi, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Steven W. Meeks, Fremont, CA (US);
KLA- Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
In one embodiment, a system to inspect an edge region of a wafer, comprises a surface analyzer assembly comprising a radiation targeting assembly that targets a radiation beam onto a surface of the wafer; a reflected radiation collection assembly to collect radiation reflected from a surface of the wafer; means for rotating the surface analyzer assembly about an edge surface of the wafer; and means for detecting one or more defects in the edge region of the wafer.