The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Oct. 20, 2003
Donald K. Smith, Belmont, MA (US);
Xing Chen, Winchester, MA (US);
William M. Holber, Winchester, MA (US);
Eric Georgelis, Canton, MA (US);
Donald K. Smith, Belmont, MA (US);
Xing Chen, Winchester, MA (US);
William M. Holber, Winchester, MA (US);
Eric Georgelis, Canton, MA (US);
MKS Instruments, Inc., Wilmington, MA (US);
Abstract
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.