The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Jun. 15, 2004
Dirk Efferenn, Dresden, DE;
Jens Hahn, Dresden, DE;
Uwe Kahler, Dresden, DE;
Chung-hsin Lin, Dresden, DE;
Jens Bachmann, Dresden, DE;
Wen-bin Lin, Dresden, DE;
Grit Bonsdorf, Dresden, DE;
Dirk Efferenn, Dresden, DE;
Jens Hahn, Dresden, DE;
Uwe Kahler, Dresden, DE;
Chung-Hsin Lin, Dresden, DE;
Jens Bachmann, Dresden, DE;
Wen-Bin Lin, Dresden, DE;
Grit Bonsdorf, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Nanya Technology Corporation, Taoyuan, TW;
Abstract
A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering the whisker-containing layer such that the whiskers are essentially removed; and structuring the whisker-free layer into the lines.