The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Nov. 03, 2003
James Lee Hendrix, Livermore, CA (US);
David Y. Wang, Fremont, CA (US);
David M. Aikens, Chester, CT (US);
Lawrence Rotter, Pleasanton, CA (US);
Joel NG, San Leandro, CA (US);
James Lee Hendrix, Livermore, CA (US);
David Y. Wang, Fremont, CA (US);
David M. Aikens, Chester, CT (US);
Lawrence Rotter, Pleasanton, CA (US);
Joel Ng, San Leandro, CA (US);
Therma-Wave, Inc., Fremont, CA (US);
Abstract
A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.