The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Aug. 11, 2003
Applicants:
Heon Lee, Sunnyvale, CA (US);
Young-jin Park, Kyung-di-do, KR;
Inventors:
Heon Lee, Sunnyvale, CA (US);
Young-Jin Park, Kyung-di-do, KR;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a process for etching poly Si gate stacks with raised STI structure where the thickness of poly Si gates at the AA and STI are different, the improvement comprising: