The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Aug. 06, 2002
Applicants:
Tue Nguyen, Fremont, CA (US);
Tai Dung Nguyen, Fremont, CA (US);
Craig Alan Bercaw, Los Gatos, CA (US);
Inventors:
Tue Nguyen, Fremont, CA (US);
Tai Dung Nguyen, Fremont, CA (US);
Craig Alan Bercaw, Los Gatos, CA (US);
Assignee:
Tegal Corporation, Petaluma, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/38 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); C23C 14/54 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for sequential processing of a workpiece comprises an assembly line processing system. The apparatus comprises multiple workpieces moving in an assembly line fashion under multiple process stations. The multiple process stations provide different processes onto the workpieces for a sequential processing of the workpieces. The sequential processing action is carried out by the movement of the workpieces under the various process stations.
Published as: